
李秀妍
教授所在系所:微纳器件与集成系统研究所
电子邮件:xiuyanli@sjtu.edu.cn
通讯地址:综合实验楼2-311
2005-2009 华东师范大学 本科
2009-2012 同济大学 硕士
2012-2015 日本东京大学 博士
2015.12-2018.1 美国Rutgers University 博士后研究员
2018.4-2018.10 日本东京大学 博士后研究员
2018.10-2024.12 上海交通大学 长聘教轨副教授
2025.1-至今 上海交通大学 长聘副教授
2026.1-至今 上海交通大学 教授
1. 基于铁电薄膜的负电容晶体管、铁电存储器等新型逻辑运算和存储器件
2. 基于宽禁带半导体SiC的高功率MOS器件
3. AI赋能半导体工艺与装备
国家级海外人才计划青年项目
2024-2026 上海市集成电路领域基础研究项目
2023-2026 国家自然科学基金面上项目
2021-2023 国家自然科学基金国际合作交流项目
2020-2022 国家自然科学基金重大研究计划培育项目
2020-2022 国家自然科学基金青年项目
华为合作开发项目
中微合作开发项目
1. Yuyan Fan, Shunda Zhang, Zhipeng Xue, Yulong Dong, Danyang Chen, Jiahui Zhang, Jingquan Liu1, Mengwei Si, Wenwu Li*, Junhao Chu, Yanwei Cao*, Zhen Wang*, Xiuyan Li*, "Hidden structural phase transition assisted ferroelectric domain orientation engineering in Hf0.5Zr0.5O2 films", Nature Communications 16, 4243, 2025
2. Danyang Chen, Yulong Dong, Tianning Cui, Zhipeng Xue, Zikang Yao, Qiang Gao, Ruixue Wang, Yuyan Fan, Jingquan Liu, Wenwu Li*, Junhao Chu, Mengwei Si* and Xiuyan Li*, "Unveiling the polarization switching pathway through tetragonal phase as a metastable intermediate state in ferroelectric HfxZr1-xO2 thin film", Nature Communications 16, 8188, 2025
3. Zikang Yao, Danyang Chen, Mengwei Si, Longchun Wang, Xiaojun Guo, Jingquan Liu*, Wei Tang,* and Xiuyan Li,* "Dual-gate Ion-Sensitive Ferroelectric Field-Effect Transistor with Ultra-High Sensitivity >1000 mV/pH and Low Operation Voltage <3 V ", IEEE International Electron Device Meeting(IEDM), 2025
4. Tianning Cui, Danyang Chen, Yulong Dong, Yuyan Fan, Zikang Yao, Hongxiao Duan, Jingquan Liu, Gang Liu, Mengwei Si*, Xiuyan Li*, "Can Interface Layer be Really Free for HfxZr1-xO2 Based Ferroelectric Field-Effect Transistors With Oxide Semiconductor Channel?", IEEE Electron Device Letters 45(3), 368-371 (2024).
5. Tianning Cui, Zhipeng Xue, Danyang Chen, Yuyan Fan, Jingquan Liu, Mengwei Si and Xiuyan Li,* "A Metastable Temperature-Strain Phase Diagram of HfxZr1-xO2 Thin Films Based on Synchrotron-based In-situ 2D GIXRD Investigation", Applied Physics Letters 125, 252903 (2024)
6. Danyang Chen, Shuman Zhong, Yulong Dong, Tianning Cui, Jingquan Liu, Mengwei Si, Xiuyan Li*, "Correlation between crystal phase composition, wake-up effect, and endurance performance in ferroelectric HfxZr1-xO2 thin films", Applied Physics Letters 122, 212903 (2023)
7. Yulong Dong, Tianning Cui, Danyang Chen, Jingquan Liu, Mengwei Si, Xiuyan Li*, "The Impact of Intrinsic RC Coupling With Domains Flipping on Polarization Switching Time of Hf0.5Zr0.5O2 Ferroelectric Capacitor", IEEE Electron Device Letters 44(9), 1480-1483 (2023).
8. Danyang Chen, Shuman Zhong, Yulong Dong, Tianning Cui, Jingquan Liu, Mengwei Si, Xiuyan Li*, "Antiferroelectric Phase Evolution in HfxZr1-xO2 Thin Film Toward High Endurance of Non-Volatile Memory Devices", IEEE Electron Device Letters 43(12), 2065-2068 (2022).
9. Yulong Dong, Danyang Chen, Ni Zhong, Jingquan Liu, Chungang Duan, Xiuyan Li*, "Systematic Interpretation of Time Effect on Negative Capacitance of Ferroelectrics Based on Electrostatics and Charge Dynamics", IEEE Transactions on Electron Devices 69(10), 5913-5920 (2022).
10. Xiuyan Li*, Akira Toriumi, "Stepwise internal potential jumps caused by multiple-domain polarization flips in metal/ferroelectric/metal/paraelectric/metal stack", Nature Communications 11, 1895 (2020).
主讲本科生课程《半导体器件原理》
主讲本科生课程《集成电路工艺技术基础》
主讲研究生课程《集成电路制造工艺与装备》